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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Scribing of thin sapphire substrates with a 266-nm Q-switched solid state laser

✍ Scribed by Rea, Jr., Edward C.; Herman, Peter R.; Fieret, Jim; Pique, Alberto; Okada, Tatsuo; Bachmann, Friedrich G.; Hoving, Willem; Washio, Kunihiko; Xu, Xianfan; Dubowski, Jan J.; Geohegan, David B.; Traeger, Frank

Book ID: 120188752
Publisher: SPIE
Year: 2004
Weight: 231 KB
Volume: 5339
Category: Article
DOI: 10.1117/12.529613

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