SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Excimer laser annealing of NiTi shape memory alloy thin film

✍ Scribed by Xie, Qiong; Huang, Weimin; Hong, Ming Hui; Song, Wendong; Chong, Tow Chong; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry

• Book ID: 118002476
• Publisher: SPIE
• Year: 2003
• Weight: 297 KB
• Volume: 4830
• Category: Article
• DOI: 10.1117/12.486531