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SPIE Proceedings [SPIE Khabaovsk, Russia - Khabrovsk (Friday 10 September 2004)] Fundamental Problems of Optoelectronics and Microelectronics II - Optical and structural properties of monocrystalline silicon wafers modified by compression plasma flow

✍ Scribed by Galkin, N. G.; Chusovitin, E. A.; Galkin, K. N.; Astashinskii, V. M.; Kostyukevich, E. A.; Kuzmitski, A. M.; Gerasimenko, A. V.; Kulchin, Yuri N.; Vitrik, Oleg B.; Stroganov, Vladimir I.

Book ID: 120169722
Publisher: SPIE
Year: 2005
Weight: 910 KB
Volume: 5851
Category: Article
DOI: 10.1117/12.634533

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