SPIE Proceedings [SPIE Israel - DL tentative - Tel-Aviv, Israel (Monday 12 November 1990)] 7th Mtg in Israel on Optical Engineering - Narrow (0.1 um to 0.5 um) copper lines for ultra-large-scale integration technology

✍ Scribed by Shacham-Diamand, Yosef Y.; Oron, Moshe; Shladov, Itzhak

• Book ID: 121312125
• Publisher: SPIE
• Year: 1991
• Weight: 449 KB
• Volume: 1442
• Category: Article
• DOI: 10.1117/12.49037