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SPIE Proceedings [SPIE ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging - Beijing, China (Tuesday 25 June 2013)] International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications - Design and simulation of double annular illumination mode for microlithography

✍ Scribed by Song, Qiang; Zhu, Jing; Yang, Baoxi; Liu, Lei; Wang, Jun; Huang, Huijie; Gu, Min; Yuan, Xiaocong; Qiu, Min

Book ID: 120924005
Publisher: SPIE
Year: 2013
Weight: 579 KB
Volume: 8911
Category: Article
DOI: 10.1117/12.2031650

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