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SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Design, Fabrication, and Characterization of Photonic Devices - Development of a laser holographic interference lithography system

✍ Scribed by Gunawan, Oki; Hoe, Lui Whye; Ooi, Boon Siew; Chan, Yuen Chuen; Lam, Yee Loy; Zhou, Yan; Osinski, Marek; Chua, Soo-Jin; Chichibu, Shigefusa F.

Book ID: 121653598
Publisher: SPIE
Year: 1999
Weight: 945 KB
Volume: 3896
Category: Article
DOI: 10.1117/12.370356

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