SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - New PTB beamlines for high-accuracy EUV reflectometry at BESSY II

✍ Scribed by Scholze, Frank; Beckhoff, Burkhard; Brandt, G.; Fliegauf, R.; Klein, Roman; Meyer, Bernd; Rost, D.; Schmitz, Detlef; Veldkamp, M.; Weser, J.; Ulm, Gerhard; Louis, Eric; Yakshin, Andrey E.; Oestreich, Sebastian; Bijkerk, Fred; Kaiser, Winfried M.; Stulen, Richard H.

• Book ID: 120434966
• Publisher: SPIE
• Year: 2000
• Weight: 330 KB
• Volume: 4146
• Category: Article
• DOI: 10.1117/12.406678