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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II - X-ray study of surfaces and interfaces

✍ Scribed by Asadchikov, Victor E.; Bukreeva, Inna N.; Duparre, Angela; Kozhevnikov, Igor V.; Krivonosov, Yury S.; Morawe, Christian; Pyatakhin, Mikhail V.; Steinert, Joerg; Vinogradov, Alexander V.; Ziegler, Eric; Duparre, Angela; Singh, Bhanwar

Book ID: 118175492
Publisher: SPIE
Year: 2001
Weight: 301 KB
Volume: 4449
Category: Article
DOI: 10.1117/12.450102

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