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SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments - Impact of lamp instability on rotating compensator based ellipsometry

✍ Scribed by Hu, Chunguang; Wang, Yongtian; Sheng, Yunlong; Sun, Lidong; Zeppenfeld, Peter; Tatsuno, Kimio; Hu, Xiaotang

Book ID: 120630001
Publisher: SPIE
Year: 2009
Weight: 375 KB
Volume: 7506
Category: Article
DOI: 10.1117/12.837430

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