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SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - The mode matching technology for MEMS gyroscopes with mutually spaced eigenfrequencies

✍ Scribed by Morozov, O.; Postnikov, A.; Kozin, I.; Soloviev, A.; Tarasov, A.; Orlikovsky, Alexander A.

Book ID: 118739637
Publisher: SPIE
Year: 2013
Weight: 899 KB
Volume: 8700
Category: Article
DOI: 10.1117/12.2016784

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