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SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2004 - San Jose, CA (Monday 26 January 2004)] Quantum Sensing and Nanophotonic Devices - Plasma etching of ZnO: a review

✍ Scribed by Nordheden, Karen J.; Razeghi, Manijeh; Brown, Gail J.

No coin nor oath required. For personal study only.

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