SPIE Proceedings [SPIE Industrial Lasers and Inspection (EUROPTO Series) - Munich, Germany (Monday 14 June 1999)] Computer-Controlled Microshaping - Laser-induced formation of semiconductor films based on transition-metal silicides

✍ Scribed by Mulenko, Sergey A.; Ovechko, Volodymyr S.; Veiko, Vadim P.; Szoerenyi, Tamas

• Book ID: 120403376
• Publisher: SPIE
• Year: 1999
• Weight: 307 KB
• Volume: 3822
• Category: Article
• DOI: 10.1117/12.364238