SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - Laser micromachining in the microelectronics industry: emerging applications

✍ Scribed by Subrahmanyan, Pradeep K.; Pique, Alberto; Sugioka, Koji; Herman, Peter R.; Fieret, Jim; Bachmann, Friedrich G.; Dubowski, Jan J.; Hoving, Willem; Washio, Kunihiko; Geohegan, David B.; Traeger, Frank; Murakami, Kouichi

• Book ID: 121692977
• Publisher: SPIE
• Year: 2003
• Weight: 753 KB
• Volume: 4977
• Category: Article
• DOI: 10.1117/12.479555