SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Surface microstructuring of transparent materials by laser-induced backside wet etching using excimer laser

✍ Scribed by Niino, Hiroyuki; Ding, Ximing; Kurosaki, Ryozo; Narazaki, Aiko; Sato, Tadatake; Kawaguchi, Yoshizo; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry

• Book ID: 121344041
• Publisher: SPIE
• Year: 2003
• Weight: 808 KB
• Volume: 5063
• Category: Article
• DOI: 10.1117/12.540486