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SPIE Proceedings [SPIE Fifth International Conference on Vibration Measurements by Laser Techniques - Ancona, Italy (Tuesday 18 June 2002)] Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Laser Doppler vibrometry for optical MEMS

✍ Scribed by Lawrence, Eric M.; Speller, Kevin; Yu, Duli; Tomasini, Enrico P.

Book ID: 121018306
Publisher: SPIE
Year: 2002
Weight: 723 KB
Volume: 4827
Category: Article
DOI: 10.1117/12.468168

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