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SPIE Proceedings [SPIE Fifth International Conference on Machine Vision (ICMV 12) - Wuhan, China (Saturday 20 October 2012)] Fifth International Conference on Machine Vision (ICMV 2012): Computer Vision, Image Analysis and Processing - Inductively coupled plasma etching of BZN thin films in SF6/Ar plasmas

✍ Scribed by Wang, Gang; Li, Ping; Zhang, Guojun; Li, Wei; Dai, Liping; Jiang, Jing; Wang, Yulin; Tan, Liansheng; Zhou, Jianhong

Book ID: 121465309
Publisher: SPIE
Year: 2013
Weight: 245 KB
Volume: 8783
Category: Article
DOI: 10.1117/12.2013904

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