SPIE Proceedings [SPIE Asia-Pacific Optical and Wireless Communications - Wuhan, China (Sunday 2 November 2003)] Materials, Active Devices, and Optical Amplifiers - Angled stripe InGaAsP/InP SLED fabricated by low-damage inductively coupled plasma dry etching

✍ Scribed by Zhang, Jun; Huang, Xiaodong; Chang, Jin; Liu, Yingjun; Gan, Yi; Li, Linsong; Wang, Dingli; Liu, Tao; Jiang, Shan; Deng, Ligang; Chang-Hasnain, Connie J.; Huang, Dexiu; Nakano, Yoshiaki; Ren, Xiaomin

• Book ID: 121200789
• Publisher: SPIE
• Year: 2004
• Weight: 109 KB
• Volume: 5280
• Category: Article
• DOI: 10.1117/12.523504