✦ LIBER ✦
SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - Structure and stability characterization of anti-adhesion self-assembled monolayers formed by vapour deposition for NIL use
✍ Scribed by Garidel, Sophie; Zelsmann, Marc; Voisin, Pauline; Rochat, Nevine; Michallon, Philippe; Lercel, Michael J.
- Book ID
- 118037044
- Publisher
- SPIE
- Year
- 2007
- Weight
- 270 KB
- Volume
- 6517
- Category
- Article
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