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SPIE Proceedings [SPIE 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical devices and Systems - Chengdu, China (Wednesday 19 November 2008)] 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Design and optimization of 2D electrostatic micro scanning mirrors

✍ Scribed by Yao, Jun; Ma, Wenying; Hu, Fangrong; Cai, Dongmei; Wang, Dajia; Qiu, Chuankai; Han, Sen; Kameyama, Masaomi; Luo, Xiangang

Book ID: 120947567
Publisher: SPIE
Year: 2009
Weight: 314 KB
Volume: 7284
Category: Article
DOI: 10.1117/12.832080

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