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SPIE Proceedings [SPIE 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator

✍ Scribed by Yin, Sumin; Zhang, Y. K.; Zhou, Jianming; Yang, Li; Wen, Shangming; Chen, Yaolong; Kley, Ernst-Bernhard

Book ID: 120440719
Publisher: SPIE
Year: 2006
Weight: 170 KB
Volume: 6149
Category: Article
DOI: 10.1117/12.674239

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