✦ LIBER ✦
SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Lithographic aspects for the fabrication of BiCMOS embedded bio-MEMS and RF-MEMS
✍ Scribed by Kulse, P.; Birkholz, M.; Ehwald, K.-E.; Kaynak, M.; Wietstruck, M.; Bauer, J.; Drews, J.; Schulz, K.; Behringer, Uwe F.W.; Maurer, Wilhelm
- Book ID
- 120449851
- Publisher
- SPIE
- Year
- 2012
- Weight
- 760 KB
- Volume
- 8352
- Category
- Article
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