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SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - XPS study on the selective wet etching mechanism of GeSbTe phase change thin films with tetramethylammonium hydroxide

โœ Scribed by Deng, Changmeng; Geng, Yongyou; Wu, Yiqun; Gan, Fuxi; Song, Zhitang


Book ID
121353639
Publisher
SPIE
Year
2013
Weight
739 KB
Volume
8782
Category
Article

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