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SPIE Proceedings [SPIE 1996 Symposium on Smart Structures and Materials - San Diego, CA (Sunday 25 February 1996)] Smart Structures and Materials 1996: Smart Electronics and MEMS - Friction in surface-micromachined microengines

✍ Scribed by Miller, Samuel L.; Sniegowski, Jeffry J.; LaVigne, Glen; McWhorter, Paul J.; Varadan, Vijay K.; McWhorter, Paul J.

Book ID: 120659365
Publisher: SPIE
Year: 1996
Weight: 368 KB
Volume: 2722
Category: Article
DOI: 10.1117/12.240444

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