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SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Optical properties of Si3N4 films produced by reactive dc-magnetron sputtering

โœ Scribed by Rille, Eduard P.; Huter, Michael; Abeles, Florin


Book ID
115519390
Publisher
SPIE
Year
1994
Weight
351 KB
Volume
2253
Category
Article

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