✦ LIBER ✦
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Electron-beam lithography data preparation based on multithreading MGS/PROXECCO
✍ Scribed by Eichhorn, Hans; Lemke, Melchior; Gramss, Juergen; Buerger, B.; Baetz, Uwe; Belic, Nikola; Eisenmann, Hans; Behringer, Uwe F. W.
- Book ID
- 118267621
- Publisher
- SPIE
- Year
- 2001
- Weight
- 480 KB
- Volume
- 4349
- Category
- Article
No coin nor oath required. For personal study only.