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Spectroscopic study of chemical composition of high-frequency glow-discharge in halogen-containing gas mixtures

✍ Scribed by O. P. Gushchin; V. M. Dolgopolov; L. E. Pereverzev; D. I. Slovetskii


Publisher
Springer US
Year
1985
Tongue
English
Weight
393 KB
Volume
43
Category
Article
ISSN
0021-9037

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