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Spectroscopic process sensors in MOVPE device production

✍ Scribed by K. Haberland; P. Kurpas; M. Pristovsek; J.-T. Zettler; M. Weyers; W. Richter

Book ID
106023486
Publisher
Springer
Year
1999
Tongue
English
Weight
611 KB
Volume
68
Category
Article
ISSN
1432-0630

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The use of a multisensor array for measuring array of 15 different gas sensors, a continuous signal the emission from a production-scale baker's yeast manupattern could be produced that could identify the differfacturing process is reported. The sensor array, conent states of the process and transit