Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring

✍ Scribed by Hsu-Ting Huang; Fred L. Terry Jr

• Book ID: 113936805
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 409 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2004.04.010