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Spectroscopic Characterization of the Atomic Hydrogen Energies and Densities and Carbon Species during Helium−Hydrogen−Methane Plasma CVD Synthesis of Diamond Films

✍ Scribed by Mills, Randell; Sankar, Jayasree; Ray, Paresh; Dhandapani, Bala; He, Jiliang


Book ID
126093130
Publisher
American Chemical Society
Year
2003
Tongue
English
Weight
234 KB
Volume
15
Category
Article
ISSN
0897-4756

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