Spectrally-resolved white-light interfer
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J. Calatroni; A.L. Guerrero; C. SΓ‘inz; R. Escalona
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Article
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1996
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Elsevier Science
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English
β 607 KB
Phase-shifting interferometry and white-light interferometry are reliable techniques for surface analysis in which the optical path difference has to be changed by some transducer to evaluate the phase. We present here a different procedure in which optical path modulation is completely avoided. Thi