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Spectral study of the physicochemical processes in an hf O2-N2glow discharge in the destruction of photoresist

✍ Scribed by V. M. Dolgopolov; V. V. Gusev; V. I. Ivanov; E. F. Shelykhmanov


Publisher
Springer US
Year
1982
Tongue
English
Weight
304 KB
Volume
36
Category
Article
ISSN
0021-9037

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The theoretical yield of HCN, calculated for a model which includes thirty flame reactions, is compared with experimental data for a flame of the same composition. In order to account for the observed low yields of HCN at low cyanogen flow rates it is necessary to postulate that the reaction OH + C: