Specific features of synthesis, chemical composition, and thermal stability of anodic borosilicate coatings on silicon

✍ Scribed by I. L. Baranov; L. V. Tabulina; L. S. Stanovaya; T. G. Rusal’skaya; Yu. A. Shostak

• Book ID: 111462026
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2007
• Tongue: English
• Weight: 144 KB
• Volume: 80
• Category: Article
• ISSN: 1070-4272
• DOI: 10.1134/s1070427207090133