Specific features of steady-state implantation of crystalline silicon with a molecular oxygen-nitrogen beam: SiL2, 3x-ray emission spectra

✍ Scribed by D. A. Zatsepin; I. R. Shein; É. Z. Kurmaev; V. M. Cherkashenko; S. N. Shamin; N. A. Skorikov; A. D. Yadav; S. K. Dubey

• Book ID: 111445961
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2008
• Tongue: English
• Weight: 250 KB
• Volume: 50
• Category: Article
• ISSN: 1063-7834
• DOI: 10.1134/s1063783408010265