Specific contact resistance and noise in contacts on thin layers: L. K. J. Vandamme and A. Douib Solid-St. Electron. 25 (11), 1125 (1982)

• Book ID: 104157308
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 89 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80110-5

✦ Synopsis

St. Electron. 25 (11), 1125 (1982)

. A method is presented for the calculation of the specific contract resistance and noise of contacts on thin layers. The contribution to the contact resistance and noise of the interfac~)~etween the contact and the layer is determined from experimental results. Using the developed method on thin CuxS layers with ~ sheet resistance of 42.5fl values for the specific contact resistance of 4 x 10-~D, cm = and 2.5Ikan ~ were observed for two different contact technologies.