𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Special issue on WaferBond‘11


Book ID
120914919
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
88 KB
Volume
19
Category
Article
ISSN
0946-7076

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📜 SIMILAR VOLUMES


Strained silicon on insulator (SSOI) by
✍ S.H. Christiansen; R. Singh; I. Radu; M. Reiche; U. Gösele; D. Webb; S. Bukalo; 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 438 KB

Strained silicon devices provide for an enhanced carrier mobility compared to that of unstrained silicon devices of identical dimensions. The device performance gets even better when using strained silicon on insulator material. We report experimental procedures based on wafer bonding, smart cutting