๐”– Bobbio Scriptorium
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Special Issue on the Physics of RF Discharges for Plasma Processing


Book ID
117932643
Publisher
IEEE
Year
1986
Tongue
English
Weight
279 KB
Volume
14
Category
Article
ISSN
0093-3813

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๐Ÿ“œ SIMILAR VOLUMES


The Bohm criterion for rf discharges
โœ Meijer, P. M.; Goedheer, W. J. ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› American Institute of Physics ๐ŸŒ English โš– 959 KB