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Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009

✍ Scribed by Thomas Becker; Ulrich Schmid; Bernd Michel


Book ID
106185925
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
106 KB
Volume
16
Category
Article
ISSN
0946-7076

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