✦ LIBER ✦
Spatially varied orientation selective epitaxial growth of CeO2(100) and (110) regions on Si(100) substrates by reactive magnetron sputtering utilizing electron beam irradiation
✍ Scribed by Tomoyasu Inoue; Shigenari Shida
- Book ID
- 113937751
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 462 KB
- Volume
- 520
- Category
- Article
- ISSN
- 0040-6090
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