Spatially resolved X-ray energy analysis
โ Scribed by Michael Aronson; Paul Horowitz
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 460 KB
- Volume
- 180
- Category
- Article
- ISSN
- 0029-554X
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## Abstract Spatially resolved Xโray diffraction (SRXRD) is applied for microโimaging of strain in laterally modulated epitaxial structures. In GaAs layers grown by liquid phase epitaxial lateral overgrowth (ELO) on SiO~2~โmasked GaAs substrates a downward tilt of ELO wings caused by their interact
Raman spectroscopy using a laser microprobe (also called micro-Raman) is becoming more widely used to study stress distribution in solids, particularly in micro-electronic device structures, because of its potential for high spatial resolution. Typically the diameter of the focused laser beam is 1 ยต