✦ LIBER ✦
Spatially resolved electron density distribution in an RF excited parallel plate plasma reactor by 1 mm microwave interferometry
✍ Scribed by Lukas, Ch; Müller, M; Gathen, V Schulz-von der; Döbele, H F
- Book ID
- 121878700
- Publisher
- Institute of Physics
- Year
- 1999
- Tongue
- English
- Weight
- 139 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0963-0252
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