Spatial potential and electron energy distribution measurement around plasma reaction zone in triode bare of (Ti, Al)N

✍ Scribed by Jung Hoon Joo; Bong Hee Hahn

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 362 KB
• Volume: 39-40
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(89)90066-2