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Spatial Energy Distributions of Sputtered Atoms and Reflected Particles during Kr + and Ar + Ion Beam Sputtering of Si and Ge

✍ Scribed by Lee, Nae-Eung


Book ID
127091353
Publisher
Institute of Pure and Applied Physics
Year
1999
Tongue
English
Weight
149 KB
Volume
38
Category
Article
ISSN
0021-4922

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