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Spatial electron density distribution in a high-power pulsed magnetron discharge

โœ Scribed by Bohlmark, J.; Gudmundsson, J.T.; Alami, J.; Latteman, M.; Helmersson, U.


Book ID
118041272
Publisher
IEEE
Year
2005
Tongue
English
Weight
282 KB
Volume
33
Category
Article
ISSN
0093-3813

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