✦ LIBER ✦
Spatial distribution of the neutral gas temperature in rf and dc magnetron sputter discharges determined by fitting rotational spectra of the N2+ using a two-temperature fit
✍ Scribed by V. Linss
- Book ID
- 108261547
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 287 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0584-8547
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