𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Spatial Distribution of Plasma Parameters in DC-Energized Hollow Cathode Plasma Jet

✍ Scribed by S. Leshkov; P. Kudrna; M. Chichina; J. Klusoň; I. Picková; P. Virostko; Z. Hubička; M. Tichý

Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
471 KB
Volume
50
Category
Article
ISSN
0005-8025

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A Study of Plasma Parameters in Hollow C
A Study of Plasma Parameters in Hollow Cathode Plasma Jet in Pulse Regime
✍ P. Kudrna; J. Klusoň; S. Leshkov; M. Chichina; I. Picková; Z. Hubička; M. Tichý 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 307 KB

## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit

Measurement of Plasma Parameters in Low
Measurement of Plasma Parameters in Low Temperature High Density Hollow Cathode Plasma Jet Working in Magnetic Field
✍ P. Virostko; Z. Hubička; P. Adámek; M. Čada; J. Olejníček; M. Tichý; M. Šícha 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 344 KB

## Abstract Low temperature low pressure hollow cathode plasma jet system working in static magnetic field was investigated by means of time resolved Langmuir probe technique. The hollow cathode discharge was excited in a cylindrical nozzle fabricated from Ti by continuous DC, pulsed DC, continuous