Production of ultrahigh vacuum by helium
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K Akaishi; K Ezaki; O Motojima; M Nakasuga
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Article
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1997
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Elsevier Science
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English
β 417 KB
For the production of ultrahigh vacuum in an unbaked vacuum system the effect of helium glow discharge cleaning as a wall conditioning technique has been investigated experimentally. A test chamber made of 304 stainless steel was constructed. Before the pump-down of the chamber it was initialized by