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Sources of error in ellipsometry

✍ Scribed by H.G. Jerrard


Book ID
118979703
Publisher
Elsevier Science
Year
1969
Tongue
English
Weight
344 KB
Volume
16
Category
Article
ISSN
0039-6028

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Quantification of errors arising in elli
✍ M.F. Lamorte; F. Abou-Elfotouh πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science βš– 543 KB

Ellipsometric analytical methods have been investigated for the measurements of thin film thickness and the optical properties of substrate material. The investigation has been facilitated by the development of computer modeling programs (THKNES and ELIPS) which determine film thickness, and the ind