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Source of metal atoms and fast gas molecules for coating deposition on complex shaped dielectric products

✍ Scribed by Metel, A.; Bolbukov, V.; Volosova, M.; Grigoriev, S.; Melnik, Yu.


Book ID
121439622
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
396 KB
Volume
225
Category
Article
ISSN
0257-8972

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