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Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering

✍ Scribed by J. Szczyrbowski; G. Bräuer; M. Ruske; G. Teschner; A. Zmelty


Book ID
117148436
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
402 KB
Volume
218
Category
Article
ISSN
0022-3093

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