Some problems and prospects in high erosion yield sputtering : G. Carter. Vacuum 34, 819 (1984)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 136 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(85)90624-9